本實驗中，我們提出了以MT ferrule及矽光學平台去固定38.5度斜角光纖陣列，再以矽光子晶片進行表面光柵耦合，利用研磨以及MT做定位做出 ×12 angle fiber array，其通道間距為250µm。以斜角光纖量測損耗為-8.82 dB，以傳統垂直耦光量測損耗約為-7.7dB，兩者相差1.05 dB。此外，以此12通道之MT光纖陣列量測4通道波導晶片之均勻性為0.22 dB，在未來希望可以使用完整元件進行量測與封裝。

In this thesis, a ×12 angled fiber array with MT ferrule is proposed for lateral grating coupling of a Si photonic integrated circuit. The ×12 38.5o angled-fiber array was formed by fiber polishing with silicon optical bench with a pitch of 250µm. The optical coupling loss of the angled fiber to a grating coupler is -8.82dB, which is 1.05dB is higher than that of the conventional vertical fiber coupling technique. In addition, the ×12 angled fiber array was used to measure the coupling loss of the ×4 waveguide array. The uniformity of the angled fiber array was 0.22dB. Then we can measurement and packaging with the complete component.

目錄

中文審定書 i
英文審定書 ii
致謝 iii
摘要 iv
Abstract v
目錄 vi
圖目錄 ix
表目錄 xii
第1章 緒論 1
1-1 前言 1
1-2 矽光子晶片的光耦合方法及困難 2
1-2-1 邊緣耦合： 2
1-2-2 表面光柵耦合: 4
1-3 矽光子積體光路封裝 5
1-4 實驗動機 7
第2章 原理與製程介紹 9
2-1 光柵耦合器(Grating coupler) 9
2-2 濕蝕刻(Wet etching) 12
2-2-1 濕蝕刻介紹 12
2-2-2 等向性蝕刻與非等向性蝕刻 13
2-2-3 補償結構 14
2-3 機台介紹 15
2-3-1 高溫石英爐管 15
2-3-2 接觸式曝光機 16
2-3-3 切割機 17
2-3-4 研磨機 18
2-4 光罩設計概念介紹 19
第3章 實驗流程 21
3-1 Silicon optical bench製作 21
3-1-1 清洗基板 21
3-1-2 濕氧法成長(Thermal oxide) 22
3-1-3 黃光微影(Photolithography) 23
3-1-4 Thermal oxide 濕蝕刻(Wet etching) 26
3-1-5 Silicon 濕蝕刻 26
3-1-6 切割 28
3-1-7 Silicon optical bench 製作流程圖 29
3-2 38.5o MT fiber array元件製作 31
3-2-1 光纖放置以及固定 31
3-2-2 研磨 32
3-2-3 光纖對準封裝 34
3-3 MT Ferrule 跳線製作 36
第4章 結果與討論 38
4-1 38.5o MT fiber array 38
4-2 耦光效率模擬 39
4-3 MT fiber array 量測與比較 45
4-3-1 垂直耦光(Vertical fiber coupling)量測 46
4-3-2 MT斜角耦光(MT angle fiber array coupling)量測 46
4-3-3 38.5o MT fiber array 均勻性量測 47
4-3-4 38.5o MT fiber array 3dB tolerance alignment 49
第5章 結論與未來展望 51
參考文獻 52

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