本論文主要分為三部份，第一部份主要介紹內埋式被動元件的設計趨勢以及有機基板的製造過程。並詳述以四層有機基板設計一螺旋型電感器資料庫之流程。第二部份為模型化理論的探討，分別推導傳統 PI 模型與修正 T 模型之方程式，利用此二類模型化理論分別對有機基板之螺旋型電感器做模型化，並加以比較兩者與量測資料吻合程度。第三部份為觀察幾何結構參數對元件電氣行為的影響加以量化，依各模型化理論分別求出其可比例伸縮方程式，建構出有機基板螺旋型電感器之可比例伸縮模型。在此設計模型中，可任意輸入螺旋型電感器之各項幾何結構參數，進而快速得到預估的詳細電氣參數。最後，以一2.4GHz帶通濾波器模擬闡釋寬頻元件模型化之重要性。

The thesis consisted of three parts. The first part introduced designed trend of the embedded passive component and the process flow of organic substrate. A design flow of spiral inductor embedded in 4 layer organic substrate has been demonstrated. Part 2 focused on the extraction equations of conventional PI model and modified T model. These two models have been applied to develop the equivalent circuits of the organic spiral inductors . The comparison between modeling and measurement results shows their difference on modeling accuracy. Part 3 introduced the scalable equations in both modeling techniques to find the equivalent circuit parameters from inductor’s geometrical parameters. A 2.4GHz band-pass filter was simulated to illustrate the application of wide band scalable modeling techniques.

目錄……………………………………………………………………….I
圖表目錄………………………………………………………………...II
第一章 緒論…………………………………………………………………...1
第二章 有機基板製程與元件設計方法………..…………………………….4
2.1有機基板應用及製程簡介……………...…………………………….4
2.2 螺旋型電感器設計流程及方法…………...…………………………7
第三章 模型化理論………………………………….………………………11
3.1內埋式電感器模型化理論……………………..……………………11
3.2 螺旋型電感器量測結果及分析……………….……………………23
3.2.1 線圈圈數的影響…………………….......……………………23
3.2.2 線寬的影響……………………………...……………………24
3.2.3 線距的影響………………………………...…………………26
3.2.4 接地層距離的影響………………………...…………………27
3.3 螺旋型電感器修正T模型建立方法…………….………………29
3.4 修正T模型與傳統PI模型之比較………………….………………32
第四章 可比例伸縮資料庫建立方法……………………….………………38
4.1 傳統PI模型之可比例伸縮技術建立方法…………………………38
4.2 修正T模型之可比例伸縮技術建立方法………………….………46
4.3 傳統PI模型與修正T模型之可比例伸縮資料庫比較…………….51
4.4 利用可比例伸縮模型建立一2.4GHz帶通濾波器之實例…...…58
第五章 結論……………………………………………………………….…60
參考文獻……………………………………………………..……………….61
附錄一 PI-a模型之各集總元件參數列表…………………………………..64
附錄二 PI-b模型之各集總元件參數列表…………………………………..65
附錄三 修正T模型之各集總元件參數列表………………………………..66








圖表目錄
第二章
表2-1 BT材質與綠漆之材料電性參數…………………………………….5
圖2-1 四層有機基板之各縱切面結構示意圖……………………………...6
表2-2 四層有機基板之各縱切面結構尺寸………………………………...6
表2-3 有機基板之螺旋電感器資料庫幾何結構參數…………………….. 7
圖2-2 一2.5圈螺旋型電感器設計圖………………………………….……9
圖2-3 一2.5圈螺旋型電感器3D立體模型………………………………..9
圖2-4 一2.5圈螺旋型電感器實際成品圖…………………………….…..10
第三章
圖3-1 電感器之PI-a模型等效電路……………………………………….11
圖3-2 電感器之PI-b模型等效電路(考慮線圈間的耦合現象)…………...12
圖3-3 電感器之修正T模型等效通用電路……………………………….13
圖3-4 1.75nH電感器之S參數量測資料………………………………….14
圖3-5 9.8nH電感器之S參數量測資料………………………………… 14
圖3-6 修正T模型運用於此內埋式有機基板螺旋型電感器之等效電路..15
圖3-7 電感器之 值頻率響應與其模型化電路………………………….17
圖3-8 參數之近似等效電路…………………………………………….19
圖3-9 參數之等效電路…………………………………….…………....21
圖3-10 含損耗元件之修正T模型參數示意圖…………………………….22
圖3-11 圈數與有效電感值 之間的關係…………………………………23
圖3-12 圈數與最大品質因數 之間的關係………………………………24
圖3-13 不同線寬條件下有效感值 與圏數之間的關係…………………25
圖3-14 不同線寬條件下最大品質因數 與圏數之間的關係……………25
圖3-15 不同線距條件下有效感值 與圏數之間的關係…………………26
圖3-16 不同線距條件下最大品質因數 與圏數之間的關係……………27
圖3-17 不同接地層距離條件下有效感值 與圏數之間的關係…………28
圖3-18 不同接地層距離條件下最大品質因數 與圏數之間的關係……28
圖3-19 只含測試接點效應之簡易PI模型…………………………………29
圖3-20 包含測試接點效應與待測物之簡易PI模型………………………29
圖3-21 與 參數之虛數部份頻率響應…………………………….........30
圖3-22 1/ 與1/ 參數之虛數部分頻率響應……………………………..30
表3-1 L15電感器各項特徵頻率值及最大品質因數列表……………….31
表3-2 L15電感器PI-a模型之各集總元件參數列表…………………….31
表3-3 L15電感器PI-b模型之各集總元件參數列表……………………31
表3-4 L15電感器修正T模型之各集總元件參數列表……………… 31
圖3-23 編號L15電感器S11之振幅頻率響應……………………………...32
圖3-24 編號L15電感器S11之相位頻率響應……………………………...32
圖3-25 編號L15電感器S12之振幅頻率響應………………………………33
圖3-26 編號L15電感器S12之相位頻率響應………………………………33
圖3-27 編號L15電感器之品質因數頻率響應…………………………34
圖3-28 編號L15量測散射參數資料與模擬散射參數資料間的差異平均值
之頻率響應………………………………………………………….34
圖3-29 編號L1電感器S11之振幅頻率響應……………………………….35
圖3-30 編號L1電感器S11之相位頻率響應……………………………….35
圖3-31 編號L1電感器S12之振幅頻率響應……………………………….36
圖3-32 編號L1電感器S12之相位頻率響應……………………………….36
圖3-33 編號L1電感器之品質因數頻率響應………………..…………37
圖3-34 編號L1電感器量測資料與模擬資料間的差異平均值之頻率響應37
第四章
圖4-1 線圈圈數對有效感值 的影響……………………………………39
圖4-2a 線寬為60μm時 變化量………………………………………...40
圖4-2b 線寬為80μm時 變化量………………………………………...40
圖4-3a 線距為60μm時 變化量…………………………………………41
圖4-3b 線距為80μm時 變化量………………………………………...41
圖4-4 接地距離為兩層介電質層時 變化量…………………………....42
圖4-5 ADS之可比例伸縮PI-a模型程式…………………………………45
圖4-6 ADS之可比例伸縮PI-b模型程式…………………………………45
圖4-7 圈數與Fp的關係……………………………………………………46
圖4-8 線距為80μm時，Fp變化量與圈數的關係………………………47
圖4-9 距離接地層兩層介電質層時，Fp變化量與圈數的關係………….48
圖4-10 範例一電感器S11振幅量測與三種可比例伸縮模型比較…………52
圖4-11 範例一電感器S11相位量測與三種可比例伸縮模型比較…………52
圖4-12 範例一電感器S12振幅量測與三種可比例伸縮模型比較…………53
圖4-13 範例一電感器S12相位量測與三種可比例伸縮模型比較………...53
圖4-14 範例一電感器品質因數量測與可比例伸縮模型比較…………….54
圖4-15 範例一電感器量測與可比例伸縮模型之平均誤差……………….54
圖4-16 範例二電感器S11振幅量測與三種可比例伸縮模型比較………55
圖4-17 範例二電感器S11相位量測與三種可比例伸縮模型比較………55
圖4-18 範例二電感器S12振幅量測與三種可比例伸縮模型比較……….56
圖4-19 範例二電感器S12相位量測與三種可比例伸縮模型比較……….56
圖4-20 範例二電感器品質因數量測與可比例伸縮模型比較…………….57
圖4-21 範例二電感器量測與可比例伸縮模型之平均誤差……………….57
圖4-22 ㄧ2.4GHz帶通濾波器之電路設計…………………………..……..58
圖4-23 使用可比例伸縮模型模擬帶通濾波器電路……………………….59

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