本論文主要是探討利用標準互補式金屬氧化物半導體製程(CMOS)實現矽光子極化分歧器，我們提出了定向耦合器(Directional coupler)形式的極化分歧器(Polarizatio beam splitter)，分別為正弦極化分歧器、三波導正弦極化分歧器，並利用串接正弦極化分歧器做成應用於矽光子陀螺一晶片的高極化消光比的極化濾波器，矽光子晶片極化控制對於許多光通訊元件來說非常的重要，因此在寬頻寬內開發具有低插入損耗（Insertion loss）和極化高消光比（Polarization extinction ratio）緊湊型高性能的極化分歧器非常的關鍵。
在波長範圍1500 nm到1600 nm，我們通過實驗證明正弦極化分歧器TE極化與TM極化的極化消光比大於15 dB的操作波長分別為30 nm 與 52 nm，最佳極化消光比分別為15 dB與26 dB，在波長1550 nm時的插入損耗分別為分別為0.122 dB與0.08 dB。三波導正弦極化分歧TE極化與TM極化極化消光比大於15 dB極化消光比操作波長就可達到100 nm，最佳的極化消光比分別為35 dB與40 dB，在波長1550 nm時的插入損耗分別為分別為0.33 dB與0.32 dB。
另外我們也透過實驗證明了利用串接正弦極化分歧器製作而成應用於矽光子陀螺儀晶片的高極化消光比極化濾波器，其元件在1550 nm到 1600 nm波長範圍內可提供大於50 dB的極化消光比，和小於1 dB的插入損耗，這與市售的LiNbO3多功能集成光學晶片（MIOC）相當。

This thesis mainly discusses the use of standard complementary metal oxide semiconductor process (CMOS) to realize the silicon photonics polarization beam splitter (PBS). We propose two directional-coupler-type polarization beam splitters (PBSs) with twin and three waveguide designs, respectively. Low insertion loss and high polarization extinction ratio (PER) are the key metrics for the proposed PBS. We further cascade the former PBS in series to enable high polarization extinction ratio for fiber optics gyroscope application. As-realized twin-waveguide PBS provides 15 and 26 dB peak PER for TE and TM polarizations with a passband bandwidth of 30 and 52 nm (PER > 15 dB), respectively. The insertion loss at 1550 nm of wavelength is around 0.122 and 0.08 dB for TE and TM polarization. Similarly, as-fabricated three-waveguide PBS provides 35 and 40 dB peak PER for TE and TM polarizations, respectively, with a passband bandwidth exceeding the detectable wavelength range (1500~1600 nm) from a grating coupler. Their insertion loss at 1550 nm of wavelength is around 0.33 and 0.32 dB for TE and TM polarization. To apply the proposed PBS for fiber-optics gyroscope applications, we further cascade five twin-waveguide PBSs in series to boost the ultimate PER to > 50 dB with an insertion loss of less than 1 dB over 1500~1600 nm wavelength range. Such a high PER value is comparable to the commercially-available LiNbO3 waveguide based multi-function integrated optical chip (MIOC).

目錄
中文審定書 i
致謝 ii
摘要 iii
Abstract iv
圖目錄 vii
表目錄 xvii
第一章 緒論 1
1-1 研究背景 1
1-2矽光子技術介紹 3
1-3研究動機 4
第二章 基礎理論 7
2-1數值模擬方法 7
2-1.1有限差分特徵模態法(FDE)求解波導模態 7
2-1.2有限時域差分法(FDTD)求解頻域響應 10
2-2 SOI波導特性 13
2-2.1 SOI條形波導 13
2-2.2 SOI板形波導 14
2-3 各類型SOI極化分歧器介紹 15
2-3.1 SOI MMI極化分歧器 16
2-3.2 SOI MZI極化分歧器 18
2-3.3 SOI DC極化分歧器 21
2-3.4 SOI各類型極化分歧器比較 26
第三章 SOI極化分歧器設計與模擬 28
3-1 正弦極化分歧器設計原理 28
3-2正弦極化分歧器設計與模擬 33
3-3 串接正弦極化分歧器模擬與設計 47
3-4 應用於矽光子陀螺儀晶片極化分歧器模擬與設計 52
3-5 三波導正弦極化分歧器模擬與設計 57
3-6 極化分歧器下線光罩布局 73
第四章 極化分歧器量測結果與分析 76
4-1 量測系統架設與介紹 76
4-2 光柵耦合器與側邊耦合器 78
4-3 正弦極化分歧器量測數據 82
4-4 串接正弦極化分歧器量測數據 103
4-5 應用矽光子陀螺儀晶片極化分歧器量測 113
4-6 三波導正弦極化分歧器量測 115
4-7 串接三波導正弦極化分歧器量測 134
第五章 結論與未來工作 142
5-1 結論 142
5-2 未來工作 145
參考文獻 148

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